École Nationale Supérieure de
Techniques Avancées

Résumé

Magnetron sputtering is a widely used coating technology, well-know in radio-frequency superconducting accelerators. In this project, we model plasma in simple magnetron sputtering devices, using the Particle in Cell code Magic Tool Suite. We focus on a three dimensional cylindrical magnetron sputtering source. Firstly, we set up the device by modeling electric and magnetic fields. We validate it with simple plasma tests. Then, we model the plasma by two approaches. We use fluid model description and particles description, which models ionization phenomena through particles collisions.