LAGARRIGUE, M. Patrick (2025) Capacitively-Coupled Plasma modelling through 1D Particle-In-Cell code PFE - Project Graduation, ENSTA.
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Abstract
This internship is part of research on capacitively coupled cold plasmas, used for semiconductor etching in the microelectronics industry. Our work is based on numerical simulations with the PIC code XPDP1, developed by Prof. John P. Verboncoeur and his team. The objective of the internship is to study the influence of various plasma control parameters, to interpret the results, and to compare them with existing theory.
| Item Type: | Thesis (PFE - Project Graduation) |
|---|---|
| Additional Information: | Contact du tuteur au laboratoire LPP (X) : Pascal CHABERT pascal.chabert@lpp.polytechnique.fr |
| Uncontrolled Keywords: | Plasma, electron, ion, argon, sheath, voltage, density, flux, power, ionization |
| Subjects: | Fluid Mechanics and Energy |
| ID Code: | 10812 |
| Deposited By: | Patrick LAGARRIGUE |
| Deposited On: | 07 oct. 2025 17:15 |
| Dernière modification: | 07 oct. 2025 17:15 |
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