Poulain, M. Arthur (2018) Modelling of Micropillar Sensor using off-the-shelf Piezoresistive Membranes PRE - Research Project, ENSTA.
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Abstract
A micropillar sensor has been developed based on a piezoresistive membrane from an offthe-shelf pressure sensor die. The deflection of the pillar which makes vary the signal voltage due to strain gauges is linked with the velocity of a flow. The feasibility of this concept of velocity or low strength sensor has been proven. The deflection of the membrane, represented as a thin plate, has been analytically calculated for a specific type of moment load using Timoshenko’s theory. Finally, the complete signal response has been found but due to many approximations made during the calculation and according to the comparison between theory, simulation and experiment, we cannot conclude about the absolute exactitude of the modelling.
Item Type: | Thesis (PRE - Research Project) |
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Uncontrolled Keywords: | Micropillar sensor, Thin plate deflection, Fourier’s series, Strain gauges, Wheatstone bridge, FEM simulation |
Subjects: | Materials Science, Mechanics and Mechanical Engineering Fluid Mechanics and Energy |
ID Code: | 7155 |
Deposited By: | Arthur Poulain |
Deposited On: | 17 avr. 2019 11:25 |
Dernière modification: | 17 avr. 2019 11:25 |
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